Lithographic apparatus

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August undefined, 2024

WebA lithographic apparatus is described, the lithographic apparatus comprising: an illumination system configured to condition a radiation beam; a support constructed to … WebThe present invention has particular, but not exclusive, use in connection with EUV lithographic apparatus and EUV lithographic tools. See patent.

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Web18 dec. 2008 · Patent application title: Lithographic apparatus and device manufacturing method Inventors: Hendrik Antony Johannes Neerhof (Eindhoven, NL) Cornelis Maria … Web9. A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate, the apparatus comprising: a substrate table configured to … grassroots church pahoa

Lithographic apparatus and device manufacturing method

WebTypical wavelengths currently in use are 365 nm (i-line), 248 nm, 193 nm and 13.5 nm. A lithographic apparatus, which uses extreme ultraviolet (EUV) radiation, having a wavelength within the range 4-20 nm, for example 6.7 nm or 13.5 nm, may be used to form smaller features on a substrate than a lithographic apparatus which uses, ... WebAn immersion lithography apparatus is disclosed in which liquid is supplied to a space between a projection system and a substrate, and a plate structure is provided to divide the space into two parts. The plate structure has an aperture to allow transmission of the projection beam, has through holes in it to reduce the damping effect of the presence of … Web14 jun. 2007 · [0002] A lithographic apparatus is a machine that applies a desired pattern onto a substrate, usually onto a target portion of the substrate. A lithographic … grass roots chicken

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Web22 dec. 2008 · [0009] Known lithographic apparatus include so-called steppers or step-and-repeat apparatus, and so-called scanners or step-and-scan apparatus. In a … WebA lithographic apparatus comprising an object table which carries an object. The lithographic apparatus may further comprise at least one … grassroots church thunder bayWeb29 nov. 2012 · The lithographic apparatus component of claim 2, wherein the lithographic apparatus component is a projection system wall, a substrate table, a mirror, a heat sink … chlamydia tests for women

"WebA lithographic apparatus, which uses extreme ultraviolet (EUV) radiation, having a wavelength within the range 4-20 nm, for example 6.7 nm or 13.5 nm, may be used to … " - Lithographic apparatus

Lithographic apparatus

Web1 mei 2008 · Lithographic apparatus include steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one pass, and … WebJP-2004006690-A chemical patent summary.

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WebA lithographic apparatus, which uses extreme ultraviolet (EUV) radiation, having a wavelength within a range of 4 nm to 20 nm, for example 6.7 nm or 13.5 nm, may be … Web588740692 - EP 4162324 A1 20240412 - SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A …

WebFind many great new & used options and get the best deals for Vintage Marx Pressed Metal Litho Dick Tracy Squad Friction Police Car in box at the best online prices at eBay! Free shipping for many products! Skip to main content. Shop by ... Trucks & Vans, Marx Collectors & Hobbyists Friction Toys, Marx Pressed Steel Vintage Manufacture Diecast ... WebThe lithographic apparatus further comprises a lens for projecting radiation beam at the patterning device with a magnification of between 0.5× and 2×, a substrate table …

WebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called scanners, in which each target portion is irradiated by scanning the pattern through the projection beam in a given direction (the “scanning”-direction) while synchronously … Web7656502 - 11472566 - USPTO . Application Jun 22, 2006 - Publication Feb 02, 2010 Harmen Klaus Van Der Schoot Noud Jan Gilissen Peter Paul Steijaert Erik Roelof …

WebLithography method and lithography apparatus 申请号：JP2024566192 申请日：20151210 公开号：JP6792572B6 公开日：20241223 摘要：A method includes exposing number of fields on a substrate, obtaining data about a field and correcting exposure of the field in subsequent exposures.

Web2 sep. 2024 · G03F7/00 — Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; G03F7/0002 — Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping chlamydia toilet seatWebPURPOSE: A lithographic apparatus is provided to decrease the sensitivity to the effects of collision in a horizontal plane and to reduce the damage caused by such a collision. … grass roots chordsWebThe lithographic apparatus according to claim 4, wherein the first seal, the second seal and/or third seal comprises any one or combinations of acrylic rubber, butadiene rubber, … grassroots church rockford ilWebLithography method and lithography apparatus 申请号：JP2024566192 申请日：20151210 公开号：JP6792572B6 公开日：20241223 摘要：A method includes exposing number … chlamydia trachomatis agWeb23 mei 2005 · Abstract: A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first … grass roots church saint clair moWebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion at one time, and so-called … grassroots civic organizationWebFind many great new & used options and get the best deals for Vintage 1940's Marx Litho Pressed Steel Sand & Gravel Dump Truck at the best online prices at eBay! Free shipping for many products! Skip to main content. Shop by category. ... Marx Pressed Steel Diecast Dump Trucks, Marx Pressed Steel Diecast Dump Trucks, chlamydia trachomatis and neisseria